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Non-linear effects on canonical MEMS models

Published online by Cambridge University Press:  06 May 2011

NICHOLAS D. BRUBAKER  and
JOHN A. PELESKO
NICHOLAS D. BRUBAKER
Affiliation:
Department of Mathematical Sciences, University of Delaware, Newark, DE 19716, USA email: brubaker@math.udel.edu, pelesko@math.udel.edu
JOHN A. PELESKO
Affiliation:
Department of Mathematical Sciences, University of Delaware, Newark, DE 19716, USA email: brubaker@math.udel.edu, pelesko@math.udel.edu
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Abstract

In modelling electrostatically actuated micro- and nano-electromechanical systems, researchers have typically relied on a small-aspect ratio to form a leading-order theory. In doing so, small gradient terms are dropped. Although this approximation has been fruitful, its consequences have not been investigated. Here, this approximation is re-examined, and a new theory which includes often neglected small curvature terms is presented. Furthermore, the solution set of the new theory is explored for the unit disk domain and compared to the standard theory. Also, the analytical results are compared to experimental data.

Keywords

Prescribed mean curvatureNon-linear eigenvalue problemMircoelectromechanical systemsFold point

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Type
Papers
Information
European Journal of Applied Mathematics , Volume 22 , Issue 5 , October 2011 , pp. 455 - 470
Copyright
Copyright © Cambridge University Press 2011

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